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Performance Analysis of JL-FinFET with Varied Non-Uniform Doping Concentrations, Fin Height and Fin Width using Device Simulator
Hazeem Hariff, M1, Noraini Othman2, Alhan Farhanah Abd Rahim3.
With the growth of the MOSFET technology, the size of the transistor becomes smaller which
can lead to Short-Channel Effects (SCEs). In order to addressthe SCEs, multi-gate transistor such as FinField-Effect Transistor (FinFET)has been invented. Meanwhile, it is found that the conventional transistor with junctions also has its drawbacks and limitations due to the decrease in the gate length. The SCEs can occur and affect the overall performance of the device with lower switching times and lower current density. In order to address these limitations, new structure of transistor without junction known as a junctionless (JL) transistor has been proposed. In this work, the impact of uniform versus non-uniformdoping concentrations, fin height (Hfin) and fin width (Wfin) in JL-FinFET were investigated by using Technology Computer Aided Design (TCAD) Tools. It was found that non-uniform doping concentration of 4 x1018 cm-3 for the source/drain and of 4 x1017 cm-3 for the channel, together with Hfin of 20 nm andWfin of 4 nm provide the best electrical performance of Ioff = 6.45 x10-17 A, Ion = 6.14 x10-6 A, Ion/Ioff = 9.52 x1010 and DIBL = 11 mV/V. The outcome of this research work can be used as a basis to understand JL-FinFET biosensors for medical applications and more complex JL structures
Affiliation:
- Universiti Malaysia Perlis, 02600 Arau, Perlis, Malaysia
- Universiti Malaysia Perlis, 02600 Arau, Perlis, Malaysia
- Universiti Teknologi MARA, Cawangan Pulau Pinang,, Malaysia
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Indexation |
Indexed by |
MyJurnal (2021) |
H-Index
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2 |
Immediacy Index
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0.000 |
Rank |
0 |
Indexed by |
Scopus 2020 |
Impact Factor
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CiteScore (1.3) |
Rank |
Q3 (Electrical and Electronic Engineering)) Q4 (Electronic, Optical and Magnetic Materials) |
Additional Information |
SJR (0.298) |
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