This study proposes a concept for establishing an Enterprise Architecture in the semiconductor manufacturing industry for equipment performance analysis using Internet of Things (IoT) technology. The plan is to implement The Open Group Framework approach as Enterprise Architecture in the manufacturing analytics department. The TOGAF approach improves data governance in the business process and analytics department. Manufacturing focuses on providing excellent and high-quality products to customers. As a result, the manufacturer must use a data analytics application to monitor the performance of the equipment. The performance of the equipment is monitored around the clock to ensure that it meets the requirements and does not exceed the threshold. The business process, data from the warehouse, and how it is processed will be discussed. Implementing Enterprise Architecture in manufacturing will also be discussed, focusing on the three layers of the TOGAF Architecture Development Method (ADM). The three layers are business, technology, and application. The Enterprise Architecture framework is a blueprint for the architecture used to align the business and information technology. Enterprise architecture optimises business processes and structures processes and functions to integrate information technology into the business. The proposed Enterprise Architecture for equipment performance analysis in the semiconductor manufacturing industry can be used as a guideline for implementing a comprehensive framework for tool performance monitoring.