The breath sensor device is fabricated using a capacitive Inter-Digitated-Electrode (IDE) platform sensor that is designed to detect moisture in human breath. The sensing material that is used to detect the presence of the moisture is Carbon-Nanotube (CNT). There are four main factors that were understudied in determining the workability performance of the sensor device such as the CNT structure, temperature, relative humidity and IDE platform design. Using Design of Experiment (DOE) approach an experimental study was conducted to investigate the effect of each factor to the performance that is aimed for the breath sensor device in relation to its response factor; capacitance (pF). It is essential to identify which factors or variables that give the significant effect to the workability performance of the breath sensor device and its functionality performance eventually. This useful insight is needed before optimization of the process can be done to further enhanced the breath sensor overall performance.